Ultrasonic application equipment FUJI ULTRASONIC ENGINEERING

TEL.+81-053-464-6460  FAX.+81-053-465-3815
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Top > In-line Concentration Meter > Binary Model (Flow cell type)

Binary Model (Flow cell type)


単成分濃度計(専用)

FUD-1 Model-13

The flow cell type model features a small flow cell type transducer designed for applications of binary solutions in semiconductor manufacturing.




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[Brochure] FUD-1 SEMI selection (1.5MB) お問い合わせ
 

System Configuration

FUD-1 Model-13 Example
単成分濃度計(専用)

Advantages

● Ultrasonic velocity method? Real time measurement with tight accuracy
● No moving part design
?No need for periodical parts replacement & calibration
● Compact PFA flow cell
?No corrosion for the chemical
● Easy installation
? No calibration at installation
● Useful functions? Easy system integration for process control in real time

Applications

  • H2O2 concentration monitoring at CMP process
  • TMAH, HNO3, H2SO4, HCl, etc monitoring at dilution process
  • HF, NH4OH, KOH, IPA, etc. monitoring at cleaning process
  • HF, H2SO4, etc monitoring at etching process



Specifications

Name
FUD-1 Model-13
Measurement parametersUltrasonic velocity and temperature
Display
LCD (concentration, temperature, velocity/various parameters)
Output Analog / DC4 - 20mA (adjustable depend on a concentration figure)
Digital / RS232C (concentration, temperature, velocity, error code)
Alarm / high, low, error
Power AC100-240V 50/60Hz, 30VA
Transmitter
Panel mount type (DIN Standard), Rack type, Rack type with a Rain-Proof Case
Environment Temp.0 – 50 degree C, RH less than 85% (No dew condensation)
0 – 100 degree C, -10 – 160 degree C (100 degree C span) [Option]
Function Output setting, Alarm-output setting, Average times setting,
Offset and Gain setting, Self-diagnosis-check,Fail Safe Mode,
Auto Error Canceller Mode
OptionRS485 Output (Alternative choice with RS232C.)
Temp. Output (DC4 - 20mA)
Channel
max. 10ch.
Adaptable transducer
Model-13 : SA-20S26 / SA-20S27 / SA-20M5

FUJI ULTRASONIC ENGINEERING
1068 Iida-cho, Chuo-ku, Hamamatsu, Shizuoka 435-0028
TEL.+81-53-464-6460  FAX.+81-053-465-3815
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