Ultrasonic application equipment FUJI ULTRASONIC ENGINEERING

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High grade models

単成分濃度計（高精度）

FUD-1 Model-130 / FUD-1 Model-530

The high-grade models can provide tighter & more stable concentration measurement

[Brochure] FUD-1 SEMI selection (1.5MB)

System Configuration

FUD-1　Model-130
単成分濃度計（高精度）

単成分濃度計（高精度）

Advantages

● Ultrasonic velocity method	? Real time measurement with tight accuracy
● No moving part design	? No need for periodical parts replacement & calibration
● Compact PFA flow cell	? No corrosion for the chemical
● Easy installation	? No calibration at installation
● Useful functions	? Easy system integration for process control in real time

Applications

H2O2 concentration monitoring at CMP process
TMAH, KOH, NH4OH, etc monitoring at dilution process
HF+H2SiF6, HF+HNO3, etc. monitoring at cleaning process
TMAH+Resist, KOH+Si, etc monitoring at etching process

Specifications

Name		FUD-1 Model-130
Measurement parameters		Ultrasonic velocity and temperature
Display		LCD (concentration, temperature, velocity/various parameters)
Output		Analog / DC4 - 20mA (adjustable depend on a concentration figure)? Digital / RS232C (concentration, temperature, velocity, error code) ?Alarm / high, low, error
Power		AC100-240V 50/60Hz, 30VA / DC24V
Transmitter		Panel mount type (DIN Standard)
Functions		Output setting, Alarm-output setting, Average times setting, Offset and Gain setting, Self-diagnosis-check, Fail Safe Mode, Auto Error Canceller Mode
Option		RS485 Output (Alternative choice with RS232C.) Temp. Output (DC4 - 20mA)
Channel		max. 10ch.
Cable		6m
Sensor material		PFA coating
Fitting connector		1/2 to 1 inch various brands
Environment	Transmitter	10 – 40 degree C RH less than 85%
	Transducer	5 – 45 degree C
	Fluid temp.	0 – 50 degree C
	Pressure	0.3MPa or less
	Flow rate	5 lpm or less

Name		FUD-1 Model-530
Measurement parameters		Ultrasonic velocity, conductivity and temperature
Display		LCD (concentration 1 & 2, temperature, velocity, conductivity/various parameters)
Output		Analog / DC4 - 20mA : 2 lines (adjustable depend on a concentration figure)? Digital / RS232C (concentration 1 & 2, temperature, velocity, conductivity, error code) ?Alarm / high, low, error 2 lines
Power		AC100-240V 50/60Hz, 30VA / DC24A
Transmitter		Panel mount type (DIN Standard)
Functions		Output setting, Alarm-output setting, Average times setting,? Offset and Gain setting, Self-diagnosis-check,?Fail Safe Mode, Auto Error Canceller Mode
Option		RS485 Output (Alternative choice with RS232C.)? Temp. Output (DC4 - 20mA)
Channel		max. 7ch.
Cable		6m
Sensor material		PFA coating
Fitting connector		1/2 to 1 inch various brands
Environment	Transmitter	10 – 40 degree C RH less than 85%
	Transducer	5 – 45 degree C
	Fluid temp.	0 – 50 degree C
	Pressure	0.3MPa or less
	Flow rate	5 lpm or less

FUJI ULTRASONIC ENGINEERING

1068 Iida-cho, Chuo-ku, Hamamatsu, Shizuoka 435-0028

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