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Top > In-line Concentration Meter > High grade models





High grade models

      
      単成分濃度計（高精度）
      
      FUD-1 Model-130 / FUD-1 Model-530 

The high-grade models can provide tighter & more stable concentration measurement


        

        
                      
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              [Brochure] FUD-1 SEMI selection (1.5MB)              お問い合わせ
            
                  
        
    
  

System Configuration
FUD-1　Model-130
単成分濃度計（高精度）

      
      
Advantages
 ● Ultrasonic velocity method ? Real time measurement with tight accuracy
 ● No moving part design ? No need for periodical parts replacement & calibration
 ● Compact PFA flow cell ? No corrosion for the chemical
 ● Easy installation ? No calibration at installation
 ● Useful functions
 ? Easy system integration for process control in real time
                
  

      
      
Applications
  • H2O2 concentration monitoring at CMP process
  • TMAH, KOH, NH4OH, etc monitoring at dilution process
  • HF+H2SiF6, HF+HNO3, etc. monitoring at cleaning process
  • TMAH+Resist, KOH+Si, etc monitoring at etching process
        		      
      
    
  

Specifications
      
      Name      FUD-1 Model-130
Measurement parametersUltrasonic velocity and temperature    
    
      Display      LCD (concentration, temperature, velocity/various parameters) 
    
    
      Output
      Analog / DC4 - 20mA (adjustable depend on a concentration figure)?
Digital / RS232C (concentration, temperature, velocity, error code)
?Alarm / high, low, error		    
    
      Power      AC100-240V 50/60Hz, 30VA / DC24V    
    
      Transmitter      Panel mount type (DIN Standard) 
    
    
      Functions
      Output setting, Alarm-output setting, Average times setting,
Offset and Gain setting, Self-diagnosis-check,
Fail Safe Mode, Auto Error Canceller Mode		    
    
      Option      RS485 Output (Alternative choice with RS232C.)
Temp. Output (DC4 - 20mA)
    
    
      Channel      max. 10ch. 
    
    
      Cable
      6m    
    
      Sensor material
            PFA coating     
    
      Fitting connector
      1/2 to 1 inch various brands 
    
    
      Environment 
      Transmitter
      10 – 40 degree C RH less than 85% 
    
    
 Transducer 5 – 45 degree C
 Fluid temp. 0 – 50 degree C
 Pressure 0.3MPa or less
             Flow rate
      5 lpm or less
    
      

      
      Name      FUD-1 Model-530
Measurement parametersUltrasonic velocity, conductivity and temperature    
    
      Display      LCD (concentration 1 & 2, temperature, velocity, conductivity/various parameters)
    
    
      Output
      Analog / DC4 - 20mA : 2 lines (adjustable depend on a concentration figure)?
Digital / RS232C (concentration 1 & 2, temperature, velocity, conductivity, error code)
?Alarm / high, low, error 2 lines		    
    
      Power      AC100-240V 50/60Hz, 30VA / DC24A    
    
      Transmitter      Panel mount type (DIN Standard) 
    
    
      Functions
      Output setting, Alarm-output setting, Average times setting,?
Offset and Gain setting, Self-diagnosis-check,?Fail Safe Mode, 
Auto Error Canceller Mode		    
    
      Option      RS485 Output (Alternative choice with RS232C.)?
Temp. Output (DC4 - 20mA)
    
    
      Channel      max. 7ch. 
    
    
      Cable
      6m    
    
      Sensor material
            PFA coating 
    
    
      Fitting connector
      1/2 to 1 inch various brands
    
    
      Environment 
      Transmitter
      10 – 40 degree C RH less than 85% 
    
    
 Transducer 5 – 45 degree C
 Fluid temp. 0 – 50 degree C
 Pressure 0.3MPa or less
             Flow rate
      5 lpm or less
    
      









	

		FUJI ULTRASONIC ENGINEERING
		
1068 Iida-cho, Chuo-ku, Hamamatsu, Shizuoka 435-0028 

		TEL.+81-53-464-6460  FAX.+81-053-465-3815
	






















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