Ultrasonic application equipment FUJI ULTRASONIC ENGINEERING

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Ternary Model (Flow cell type)

FUD-1 Model-53

The flow cell type model features a small flow cell type transducer designed for applications of ternary solutions in semiconductor manufacturing.

[Brochure] FUD-1 SEMI selection (1.5MB)

System Configuration

FUD-1　Model-53
多成分濃度計（専用）

Advantages

● Combined technology of velocity & conductivity	? Real time measurement with tight accuracy
● No moving part design	? No need for periodical parts replacement & calibration
● Compact PFA flow cell	? No corrosion for the chemical
● Easy installation	? No calibration at installation
● Useful functions	? Easy system integration for process control in real time

Applications

HF+H2SiF6, HF+HNO3, etc. monitoring at cleaning process
TMAH+Resist, KOH+Si, etc monitoring at etching process

Specifications

Name		FUD-1 Model-53
Measurement parameters		Ultrasonic velocity, conductivity and temperature
Display		LCD (concentration 1 & 2, temperature, velocity/various parameters)
Output		Analog / DC4 - 20mA 2 lines (adjustable depend on a concentration figure) Digital / RS232C (concentration 1 & 2, temperature, velocity, conductivity, error code) Alarm / high, low, error 2 lines
Power		AC100-240V 50/60Hz, 30VA
Transmitter		Panel mount type (DIN Standard)
Environment		Temp.0 – 50 degree C, RH less than 85% (No dew condensation) 0 – 100 degree C

Function		Output setting, Alarm-output setting, Average times setting, Offset and Gain setting, Self-diagnosis-check, Fail Safe Mode, Auto Error Canceller Mode
Option		RS485 Output (Alternative choice with RS232C.) Temp. Output (DC4 - 20mA)
Channel		max. 7ch.
Adaptable transducer		SA-20S36 (PFA coating) / ?GC-20S27 (Grassy Carbon)

FUJI ULTRASONIC ENGINEERING

1068 Iida-cho, Chuo-ku, Hamamatsu, Shizuoka 435-0028